[labnetwork] Gold e-beam deposition - carbon contamination

[Youry Borisenkov]

Hi All and happy Friday,
I know it is a topic that has been discussed multiple times, however, I'm
still lacking a solution that works and will appreciate you sharing your
experience.

Currently we are using a Fabmate crucible, and getting some carbon
contamination .
For clean Gold layers we use thermal evaporation. The films are good but it
requires a lot of gold.

So far we tried using a Molybdenum crucible with and without a spacer. The
issue with this approach was that eventually after some time, we get carbon
contamination back. I believe it's present in the chamber and eventually a
critical mass is built on top of the gold in the crucible, coming from the
chamber.

Were anyone successful in overcoming carbon contamination in their e-beam
deposition overtime?
What are the procedures you are following? Maybe cleaning more frequently?

-- 
Thank you,
Youry Borisenkov
CNI <https://cni.columbia.edu/columbia-university-clean-room>
Columbia University
CEPSR 1017, New York, NY, 10027, United States.
<https://sustainable.columbia.edu/crown-commuter>
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