[labnetwork] [EXTERNAL] Gold e-beam deposition - carbon contamination

[Czwakiel, James]

Youry

Once contamination is detected…. Clean clean clean
All metal covers removed and blasted and ultra sonically cleaned
Plus …. Make sure crucibles are not touched even with gloved hands….. always use tweezers


James Czwakiel

Semiconductor Equipment Engineer

[Image]



Get Outlook for iOS<https://aka.ms/o0ukef>
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Youry Borisenkov <yb2471 at columbia.edu>
Sent: Friday, January 31, 2025 11:59:09 AM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [EXTERNAL][labnetwork] Gold e-beam deposition - carbon contamination


CAUTION: This email originated from outside of the organization. Do not click links or open attachments unless you recognize the sender and know the content is safe.

Hi All and happy Friday,
I know it is a topic that has been discussed multiple times, however, I'm still lacking a solution that works and will appreciate you sharing your experience.

Currently we are using a Fabmate crucible, and getting some carbon contamination .
For clean Gold layers we use thermal evaporation. The films are good but it requires a lot of gold.

So far we tried using a Molybdenum crucible with and without a spacer. The issue with this approach was that eventually after some time, we get carbon contamination back. I believe it's present in the chamber and eventually a critical mass is built on top of the gold in the crucible, coming from the chamber.

Were anyone successful in overcoming carbon contamination in their e-beam deposition overtime?
What are the procedures you are following? Maybe cleaning more frequently?

--
Thank you,
Youry Borisenkov
CNI<https://cni.columbia.edu/columbia-university-clean-room>
Columbia University
CEPSR 1017, New York, NY, 10027, United States.
[https://sustainable.columbia.edu/sites/default/files/content/crown%20commuter%20badge_0.png]<https://sustainable.columbia.edu/crown-commuter>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20250131/b8ea83bf/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: Image.png
Type: image/png
Size: 11688 bytes
Desc: Image.png
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20250131/b8ea83bf/attachment.png>