[labnetwork] gas abatement question

[Iulian Codreanu]

Hi Nathanael,

I have 3 dry bed system for 3 tools. Each tool has its own scrubber 
because of chemical compatibility and where they are located but I had 
two tools exhausted into one scrubber in the past. If chemistries are 
compatible, you have to size things correctly and have the proper resin 
mixture in the beds. You could get a system with dual resin canisters so 
you do not have multiple tools down when they are depleted.

Iulian

iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
https://udnf.udel.edu

On 7/10/2025 8:17 PM, Nathanael Sieb wrote:
>
> Hi all,
>
> We are working on installing a new VHF system and a PECVD in our lab.  
> We are looking at dry scrubbers for the gas abatement.  One question 
> is whether we purchase one larger system for both tools or get a 
> smaller one for each tool.  Has anyone manifolded two separate tools 
> into one abatement scrubber?
>
> I have 2 main concerns:
>
> - waste gas from one operating tool back-flowing into the other 
> shut-down tool
>
> - 'using up' the neutralizing capacity for one tool before the other 
> (i.e., heavier than expected usage on one tool resulting in a need to 
> change the canister even though the other tool can be neutralized fine)
>
> I would appreciate any feedback folks could offer!
>
> Also, if you have any opinions on potential systems, please feel free 
> to reach out to me directly.
>
> Thanks,
>
> Nathanael
>
> *Nathanael Sieb *
> Director of Operations and Administration  | 4D LABS 
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> Simon Fraser University
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