[labnetwork] Boron Nitride Sputtering

[William Hyland]

Hi All,

Does anyone have any experience/insight on Boron Nitride sputtering? Our main concern with introducing this target into our sputter system is that of chamber contamination. Considering Boron is used as a dopant; we suspect that it could affect future depositions in that system. I look forward to hearing your responses.

Thanks,
Will

Will Hyland
Associate Process & Equipment Engineer

Pritzker Nanofabrication Facility
The University of Chicago
Eckhardt Research Center
5640 S. Ellis Ave., Room LL180
Chicago, IL  60637

773.834.4978 office

whyland at uchicago.edu<mailto:whyland at uchicago.edu>  |  pme.uchicago.edu<http://pme.uchicago.edu/>


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