[labnetwork] Boron Nitride Sputtering

[Liu, Bangzhi]

We can grow BN using both thermal and PEALD here at Penn State if you want to try other ways than sputtering.

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From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of William Hyland <whyland at uchicago.edu>
Sent: Friday, July 11, 2025 5:11:53 PM
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Subject: [labnetwork] Boron Nitride Sputtering

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Hi All,



Does anyone have any experience/insight on Boron Nitride sputtering? Our main concern with introducing this target into our sputter system is that of chamber contamination. Considering Boron is used as a dopant; we suspect that it could affect future depositions in that system. I look forward to hearing your responses.



Thanks,

Will



Will Hyland

Associate Process & Equipment Engineer



Pritzker Nanofabrication Facility

The University of Chicago
Eckhardt Research Center
5640 S. Ellis Ave., Room LL180

Chicago, IL  60637



773.834.4978 office


whyland at uchicago.edu<mailto:whyland at uchicago.edu>  |  pme.uchicago.edu<http://pme.uchicago.edu/>




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