[labnetwork] Etching WO3

[Dan P. Woodie]

Mario,

I have always found the CRC Handbook of Metal Etchants to be useful. It is a collection of over 50 years’ worth of references to papers that would give some level of data on an etchant mixture and you could usually find one that indicated some level of selectivity to what you wanted. Often you need to find the original paper to get the full story, but it is a good starting point. I had purchased it years ago, but recently found a copy on the web: https://www.vector.umd.edu/images/links/Handbook_of_Metal_Etchants.pdf.

Dan

Daniel Woodie
Director, Micro/Nano Fabrication Center, Princeton Materials Institute

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Beaudoin, Mario
Sent: Friday, March 14, 2025 7:15 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Etching WO3


Dear Network,

I have a big copper sputter target holder on which a WO3 (tungsten tri-oxide) target on it.  I'd like to etch away the WO3 and keep the copper.  Anyone can recommend some appropriate wet chemistry?

Best

Mario
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