[labnetwork] Question about exhaust lines for XeF2 etchers

[Malhotra, Sandra Guy]

Howdy All,
We are in the process of installing a XeF2 etcher. We understand that small quantities of Xe, F2, SiF4, and HF will be present in the exhaust. The issue is whether CPVC or stainless steel should be used for the exhaust lines. Inputs from anyone who has installed such a system would be greatly appreciated.

Thanks!

Sandra G. Malhotra, Ph.D.  |  Senior Laboratory Manager


We would greatly appreciate an acknowledgement of your work in AggieFab:  “The nanofabrication was conducted in the Texas A&M University AggieFab Nanofabrication Facility (RRID:SCR_023639), which is supported by the Texas A&M Engineering Experiment Station and Texas A&M University."


AggieFab Nanofabrication Facility

https://aggiefab.tamu.edu/

Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University

3253 TAMU | College Station, TX 77843

ph: 979.845.3199  |  sandra.malhotra at tamu.edu<mailto:sandra.malhotra at tamu.edu>


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TEXAS A&M UNIVERSITY | FEARLESS on Every Front



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