[labnetwork] ideas to clean gold sputter target

[Mark Hofheins]

I use fine glass beads in a bead blaster for all target cleaning. Then DI rinse, propenol alcohol rinse, N2 dry, and vacuum packing with a food grade vacuum packing machine.
(seal a meal or equivalent). This process keeps the targets from getting native oxide growth. Au doesn't really have that problem.



Mark Hofheins



mhofheins at unm.edu<mailto:mhofheins at unm.edu>

Cell  505-259-9278

Office 505-272-7506



Micro Electronics Technician &

 Safety Coordinator MTTC

Manufacturing Engineering/

School of Engineering

Science and Technology park

University of New Mexico

800 Bradbury S.E.  Suit 169

Albuquerque, New Mexico

87106-4346


________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Fubo Rao <furao at ucsd.edu>
Sent: Friday, May 9, 2025 4:53 PM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] ideas to clean gold sputter target

You don't often get email from furao at ucsd.edu. Learn why this is important<https://aka.ms/LearnAboutSenderIdentification>

  [EXTERNAL]

Dear Colleagues,

What would you recommend for cleaning this Au sputter target that has been partially coated/contaminated with other materials? There are probably a few material coatings on the target, before this was found out. Sputtering the materials off, or sand blasting will waste a lot of gold. Thanks in advance.

[image.png]

Thanks,

Fubo Rao, Ph.D.,
Nano3 Technical Director,
Qualcomm Institute/Atkinson Hall,
UC San Diego
9500 Gilman Drive #0436
La Jolla, CA 92093-0436
Tel. (858)534-4518
Cell: (858)375-9190
E-mail: furao at ucsd.edu<mailto:furao at ucsd.edu>
https://nanofab.ucsd.edu/
About Nano3<https://nanofab.ucsd.edu/about/>
[https://www.linkedin.com/company/ucsd-nano3-shared-research-facility/]<https://www.linkedin.com/company/ucsd-nano3-shared-research-facility/>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20250512/22a82c06/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image.png
Type: image/png
Size: 263086 bytes
Desc: image.png
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20250512/22a82c06/attachment.png>