[labnetwork] SAMCO SECS/GEM Communication Manuals

[Huguenin, Carrie - 0835 - MITLL]

Hello Lab Network-

We need to get our hands on the SECS/GEM communications information for the
following two SAMCO reactive ion etcher models.

1.	Samco RIE-202-iPC 
2.	Samco RIE-200-iPC 

We've requested the SECS/GEM manuals directly from Samco with no response.
If one of you has coms configuration information for these models, that
would be helpful information.   Thanks for your time.

Regards,

-Carrie

 

S. Carolene Huguenin

Associate Group Leader

Microelectronics Laboratory

ML 201-B

(o):  (781) 981-1643

(m): (781) 238-0317


244 Wood Street

Lexington, MA 02420

 

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20250512/bce34be7/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image001.gif
Type: image/gif
Size: 2464 bytes
Desc: not available
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20250512/bce34be7/attachment.gif>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: smime.p7s
Type: application/pkcs7-signature
Size: 5819 bytes
Desc: not available
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20250512/bce34be7/attachment.p7s>