[labnetwork] Issue Striking Plasma for NiFe Sputtering on Angstrom Nexdep PVD System – Need Guidance

[Rob Belan]

Hi Pial,

Most magnetron sputtering cathodes require a high strength magnet set up to sputter targets with high magnetic permeability like NiFe.  Also they require the target to be as close to the cooling well/magnet set as possible – therefore there should not be a backing plate on the NiFe target the target should sit directly on the sputtering gun.

One way to tell for sure is that if the magnetic field is too weak, the DC power supply will output all voltage and very little to no current.  So monitor voltage when this gun has power applied to it.  If the voltage goes high and there is no plasma this means that most likely the magnets and/ or the target configuration are wrong.

Rob


Rob Belan
Technical Director PVD Products
Tel: +1 (412) 387-9200 x7378| Cell: +1 (412) 398-1275| Fax: +1 (412) 233-4375
| Email: robb at lesker.com 
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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Mohammad Mohtasim Hamid Pial
Sent: Monday, October 13, 2025 4:32 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Issue Striking Plasma for NiFe Sputtering on Angstrom Nexdep PVD System – Need Guidance

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Dear All,

I am attempting to deposit NiFe using a magnetron sputtering setup (Angstrom Engineering – Nexdep PVD platform). Below are my target specifications and sputtering parameters:

Target: NiFe (2" dia × 1 mm, 4N purity) bonded to a 1/8" Cu backing plate
Sputtering Method: DC Magnetron Sputtering
DC Power: 100–150 W
Base Pressure: ~10⁻⁶ Torr
Ar Gas Flow Rate: 20–30 sccm
Working Pressure: 3–5 mTorr

However, I am unable to ignite the plasma. The DC power supply setpoint keeps blinking and the power stalls around 15 W before dropping

Could this issue be due to insufficient magnetic field strength (not penetrating the thick target/Cu backing), or is the target too thick for effective plasma ignition? Do I need a thinner target or additional magnetic confinement?

I would greatly appreciate any insights or recommendations from anyone who has sputtered NiFe or similar high-permeability alloys on this platform.

Thank you in advance!
Pial


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