[labnetwork] Printing 360nm circles with 460 nm hex pitch

[Chang, Long]

Hi All,

I’m exploring approaches to print 360 nm circles with 460 nm hex pitch for lifting off ~100 nm of Cr/Au. We can do it with EBL, but we want to scale. Can this be done with a stepper? Does anyone have experience with the PhableR Talbot lithography system?

Thanks,
Long Chang
Research Professor, ECE
Manager, UH Nanofabrication Facility (UHNF)
University of Houston
713-743-5235
nanofab.uh.edu

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