[labnetwork] Printing 360nm circles with 460 nm hex pitch

[Christian Spoerl]

Dear Long,

have a look at https://holistep.org/
Holographic lithographic stepper.
This technology may do it.

Best regards
Christian

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*Christian Spoerl*
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*idonus sarl*
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christian.spoerl at idonus.com <mailto:christian.spoerl at idonus.com>
www.idonus.com <https://www.idonus.com>

On 10.04.2026 17:35, Chang, Long wrote:
> Hi All,
>
> I’m exploring approaches to print 360 nm circles with 460 nm hex pitch 
> for lifting off ~100 nm of Cr/Au. We can do it with EBL, but we want 
> to scale. Can this be done with a stepper? Does anyone have experience 
> with the PhableR Talbot lithography system?
>
> Thanks,
> Long Chang
> Research Professor, ECE
> Manager,UH Nanofabrication Facility (UHNF)
> University of Houston
> 713-743-5235
> nanofab.uh.edu
>
>
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