[labnetwork] Bismuth Dry Etch Recipes

[Sun, Yong]

Hi Cody,

You may try CH4/H2/Ar plasma, see the following papers for your reference:
1. https://www.sciencedirect.com/science/article/pii/S016943321401928X#:~:text=Experimental,pressure%20and%20gas%20flow%20rate.
2. https://apps.dtic.mil/sti/tr/pdf/ADA475544.pdf

Best,
Yong Sun

________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Cody Corey <ccorey24 at mit.edu>
Sent: Thursday, February 12, 2026 4:28 PM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Bismuth Dry Etch Recipes

Hi all,

I have a user inquiring about etching a bismuth substrate, and we don't have any readily available recipes on our tools. Does anyone have experience dry etching Bi? I was thinking a recipe with CH4 and Ar given that trimethyl-bismuth has a low boiling point. I don't have any Bi substrates to practice on, otherwise I'd try out some etch chemistries on my own.

If anybody has any recipes that they are willing to share, I would be very grateful! Etching would be done in a SAMCO 230ip (ICP+bias) or a Plasmatherm 210RL (parallel plate RIE).

Best,

Cody Corey (He/Him)
Research Specialist

MIT.nano
32 Vassar St. Cambridge, MA 02139
12-4011

ccorey24 at mit.edu
Cell: 860-576-3230

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