[labnetwork] Bismuth Dry Etch Recipes

[Cody Corey]

Hi all,

I have a user inquiring about etching a bismuth substrate, and we don't have any readily available recipes on our tools. Does anyone have experience dry etching Bi? I was thinking a recipe with CH4 and Ar given that trimethyl-bismuth has a low boiling point. I don't have any Bi substrates to practice on, otherwise I'd try out some etch chemistries on my own.

If anybody has any recipes that they are willing to share, I would be very grateful! Etching would be done in a SAMCO 230ip (ICP+bias) or a Plasmatherm 210RL (parallel plate RIE).

Best,

Cody Corey (He/Him)
Research Specialist

MIT.nano
32 Vassar St. Cambridge, MA 02139
12-4011

ccorey24 at mit.edu
Cell: 860-576-3230

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