[labnetwork] Photomask sticks to SU8

[Phillip Bauer]

Vendors need to cover themselves to avoid "but your datasheet said.....".  Generally, the Spin Curves for Mean thickness targeting work for most spin coaters and can be used for trouble shooting, (i.e. 4000 RPM +/- 50RPM dry time worked for a given target for months and then all of sudden it takes 2500RPM to achieve the same thickness.)  I do like the inputs of a control Ramp down after the 95C Time at temp to prevent cracking and the surface stickiness check. I  A little off topic

Phil



Thank you,

Phillip Bauer

Principal Photolithography Process Engineer

4350 Innovation Drive
Farmers Branch, Texas 75244

phillip.bauer at formfactor.com<mailto:phillip.bauer at formfactor.com>

M: 682 521 0874

[cid:06d36589-2483-4ff6-8127-273b88baffa0]





________________________________
From: Jasper Nijdam <ajn5 at georgetown.edu> on behalf of Jasper Nijdam <Jasper.Nijdam at georgetown.edu>
Sent: Tuesday, February 17, 2026 8:40 AM
To: pennell at cnf.cornell.edu <pennell at cnf.cornell.edu>
Cc: Demis D. John <demis at ucsb.edu>; Robert Nidetz <nidetz at umich.edu>; labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>; Phillip Bauer <Phillip.Bauer at formfactor.com>
Subject: Re: [labnetwork] Photomask sticks to SU8


  *
I have found that the bake times listed in the vendor sheet are "guidelines".

The reason why baking times are guidelines is that we all bake differently. Some in overs, some on hot plates and some of those are covered.
Temperature (if accurate) and air flow matter.

As does the moon phase.

Yours,

--
Jasper Nijdam
Technical Manager GNuLab, Georgetown University

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