[labnetwork] Co and Pd precursors on PEALD processes?

[Brian K. Olmsted]

Hi everyone,

We are looking at taking on a project that will use Cobalt and Palladium in
our PEALD tool. Cobalt is a new material for us and I'm wondering if anyone
has experience they can share concerning safety or process
cross-contamination we should be apprised of.

Thanks in advance for any insight or advice you can provide.

Brian K. Olmsted
Associate Director of Laboratory Operations
University of Minnesota | Minnesota Nano Center
cse.umn.edu/mnc
612.626.3287
olms0025 at umn.edu
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