[labnetwork] HMDS oven

[Jorg Scholvin]

Hi Michael

Not strictly, but here are two things to consider:

  1.  Workflow efficiency.  It's nice to have it next to (or very near) the spinners so users notice when the oven is done (and can prepare the coater or exposure tools while the oven is running). Also reduces issues where someone is busy and forgets to unload it, and then enthusiastic people collide...
  2.  The Yes HMDS ovens support ammonia-based image reversal processing (https://www.yes.tech/products/ta-series).  We don't do that at MIT.nano, but if we ever wanted to (i.e. a standard positive resist can be run as an image reversal resist, via an ammonia oven bake) being in yellow light location is necessary.

For us, reason 1 is important. Reason 2 currently not as much.

Best,

-Jorg




From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Johnson, Michael W
Sent: Wednesday, January 21, 2026 11:15 AM
To: Network Fab <labnetwork at mtl.mit.edu>
Subject: [labnetwork] HMDS oven

Simple question:

Is it necessary to locate an HMDS oven in an amber light space as part of a lithography tool set? Could it not be located in a white light area directly adjacent an amber light space?

-Michael.
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