[labnetwork] HMDS oven

[Hope Fa-Kaji]

Hi Michael,

I see no need for this unless you have some kind of particle concern
transporting substrates between the oven and your litho area.
Our HMDS oven is in a separate bay from our photoresist track.

Thanks,
Hope

On Wed, Jan 21, 2026 at 3:29 PM Johnson, Michael W <mjohnso6 at tulane.edu>
wrote:

> Simple question:
>
> Is it necessary to locate an HMDS oven in an amber light space as part of
> a lithography tool set? Could it not be located in a white light area
> directly adjacent an amber light space?
>
> -Michael.
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-- 
*All the best,*

Hope Fa-Kaji
Semiconductor Equipment Engineer
MicroSystems Laboratory
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