[labnetwork] HMDS oven

[Yakimov, Michael]

IMHO - The only reason to put it in the yellow area is if you expect to run ammonia image reversal process in the same setup (that was one of things people did with YES HMDS ovens). Strictly HMDS process should be illumination agnostic.
But....  you may expect requests for image reversal after all, and having no NH3 plumbing isn't a show-stopper..

Mike



_______________________________________________
Michael Yakimov
Research scientist
Department  of Nanoscale Science and Engineering
University at Albany - State University of NY

253 Fuller rd.
Albany NY 12203

Phone: 518-437-8609 lab
e-mail: myakimov at albany.edu<mailto:myakimov at albany.edu>




From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Johnson, Michael W
Sent: Wednesday, January 21, 2026 11:15
To: Network Fab <labnetwork at mtl.mit.edu>
Subject: [labnetwork] HMDS oven

Simple question:

Is it necessary to locate an HMDS oven in an amber light space as part of a lithography tool set? Could it not be located in a white light area directly adjacent an amber light space?

-Michael.
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