[labnetwork] HMDS oven

[bordonaro]

 Vapor priming can be done in white light as no photosensitve material is involved. Garry J. Bordonaro
Microlithographic Engineer
Cornell NanoScale Facility
250 Duffield Hall
343 Campus Road
Ithaca NY 14853-2700(607) 254-4936
bordonaro at cnf.cornell.edu
http://www.cnf.cornell.edu/Sent from my Verizon, Samsung Galaxy smartphone
-------- Original message --------From: "Johnson, Michael W" <mjohnso6 at tulane.edu> Date: 1/21/26  6:31 PM  (GMT-05:00) To: Network Fab <labnetwork at mtl.mit.edu> Subject: [labnetwork] HMDS oven 
Simple question:


Is it necessary to locate an HMDS oven in an amber light space as part of a lithography tool set? Could it not be located in a white light area directly adjacent an amber light space?


-Michael.


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