[labnetwork] Backside Alignment Microscopes

[Jeff McKay]

Hello All,

We currently use Karl Suss MA6 for lithography on the backside of 4" InP
wafers. It is critical that we have good back to front side alignment, and
right now we can only use the MA6 to verify alignment.

Unfortunately there is no scale/camera options for outputting to get
quantative data from our alignment.

We are looking for a bench top tool/microscope that would allow us to check
alignment after development so that we are getting higher resolution and
more quantative results. Does anyone have any recommendations?

Thanks,
Jeff McKay

Process Engineer
Global Communications Semiconductor
Torrance, CA
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