[labnetwork] Welcome to NAPEX

[Lavendra Yadav Mandyam]

Dear Colleagues,

Welcome to the newly formed North American Plasma Etch Exchange (NAPEX). NAPEX is derived from the tremendous success of the recent National Nanotechnology Coordinated Infrastructure (NNCI) etch working group. The group's history extends back 22 years to the National Nanotechnology Infrastructure Network (NNIN), when biannual workshops were held exclusively at Cornell University's Nanofabrication Facility (CNF) for a decade. With the formation of the NNCI in 2015, etch workshops and symposia were held at various network sites, including Stanford, Harvard, Penn, Georgia Tech, and recently in 2025 at MIT.nano and Harvard. Attendance has grown from 30-40 participants, mostly network etch personnel, to more than 200 attendees from across the nation. NAPEX represents an expansion of the group to include our colleagues across the USA and Canada, including academic and government lab etch personnel. NAPEX will provide a forum where we can address the growing challenges facing plasma etching and propose creative solutions.

We invite you to visit our website at https://sites.google.com/view/napex-plasma-etch-exchange/home for additional information and upcoming events. A virtual symposium is planned for October 2026, featuring expert talks on critical issues facing nanoscale pattern transfer, so please check the site for updates. In addition, we plan to hold periodic virtual town hall meetings where we can collectively discuss the etch processes and equipment issues that are important to you. An in-person symposium is also planned for later in 2027, featuring talks, vendor participation, and an expert panel discussion.

If you have any questions, please contact any member of the leadership team listed below, or reach out to us at Join.napex at gmail.com<mailto:Join.napex at gmail.com>. We eagerly look forward to your participation.

Best regards,
Ling Xie: lxie at cns.fas.harvard.edu<mailto:lxie at cns.fas.harvard.edu>
Vince Genova: vjg6 at cornell.edu<mailto:vjg6 at cornell.edu>
Lavendra Mandyam: lavendra at stanford.edu<mailto:lavendra at stanford.edu>
Durga Gajula: dgajula at gatech.edu<mailto:dgajula at gatech.edu>


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Lavendra Mandyam
Senior Process Engineer – Dry Etching
Stanford Nanofabrication Facility
Paul G. Allen Building
420 Via Palou Mall
Stanford, CA 94305
Phone: (650) 498-1304
https://snf.stanford.edu/
lavendra at stanford.edu<mailto:lavendra at stanford.edu>


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