[labnetwork] EBL facility temperature control

[Brown, Devin K]

Dear colleagues-

I have been wanting to know the common situation and actual experience for temperature and humidity control for the installed locations of electron beam lithography systems. I've put together the following poll with just a few basic questions. If you would be so kind to take the poll, it won't take too much time. I would be happy to share the results when finished.

https://docs.google.com/forms/d/e/1FAIpQLSefbDv8BxPB8QcmhR-pg0dT3PF61a0V349Z6HRV18OmkRs4Bg/viewform?usp=publish-editor

Kind regards-

Devin K. Brown, Ph.D.

Principal Research Engineer

Institute for Matter and Systems

Georgia Institute of Technology

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