[labnetwork] Electron Beam Lithography Workshop/Short Course

[Brown, Devin K]

Hello all-

We are holding an EBL workshop/short course at Georgia Tech on June 29,30. See BELOW for details. Registration deadline is June 10.

This workshop is geared towards BEGINNERS and covers FUNDAMENTALS appropriate for ANYONE even if they use a different EBL model/make than our tool.

Kind regards-

Devin K. Brown, Ph.D.

Principal Research Engineer

Institute for Matter and Systems

Georgia Institute of Technology

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Join us for an intensive hands-on Electron Beam Lithography (EBL) Workshop hosted by the Institute for Matter and Systems (IMS), Georgia Tech. This two-day workshop is designed to provide participants with practical training in high-resolution nanoscale fabrication, covering the complete workflow from pattern design to final device processing.

Workshop Highlights:
• Pattern design and data preparation using BEAMER
• High-resolution exposure on the Elionix ELS-G100 Electron Beam Lithography System
• Pattern transfer using advanced etching techniques
• Metal deposition and lift-off processing
• Hands-on cleanroom experience with expert guidance

This workshop offers practical exposure to fabrication techniques widely used in microelectronics, photonics, MEMS, and quantum device research.

Who Should Attend?
Researchers, graduate students, academic users, government researchers, and industry professionals interested in advanced nanoscale fabrication.

📍 Location: Marcus Nanotechnology Building, Georgia Tech
📅 Workshop Dates: June 29th–30th, 2026
⏳ Registration Deadline: June 10th, 2026

Registration Rates (includes lunch on both days)
• Georgia Tech Participants: $200
• Academic / Government Participants: $400
• Industry Participants: $1000

Register here: https://matter-systems.gatech.edu/short-courses-and-workshops

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