[labnetwork] Experience with Refractory Metal Liners for Pt E-beam Evaporation

[Richelson, Tucson]

Hello,

Does anyone have experience using refractory metal crucible liners for e-beam evaporation of platinum?
I am currently using Fabmate, which performs well until the platinum reaches higher temperatures, at which point carbon contamination becomes an issue. I have had good results using a tungsten liner for gold, and I’m considering trying tungsten for platinum as well.

However, I’ve come across online sources suggesting that refractory metals may not be compatible with platinum. I’d appreciate any insights or recommendations based on your experience. Thank you in advance.



Best,

Tucson Richelson

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Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)

University of Illinois
Rm 2104

208 North Wright St. Urbana, IL 61801

Ph: 217-244-5138

Web: http://mntl.illinois.edu/
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