[labnetwork] Experience with Refractory Metal Liners for Pt E-beam Evaporation

[Gabriel Catalano]

Hi Tucson,

Your online sources are correct, you cannot use refractory metal liners for Pt. We tried it (tungsten liner) and the Pt alloyed with the liner after a few depositions, causing the liner to totally collapse. Would not advise.

Best,
Gabe (Nano at Stanford)
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From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Richelson, Tucson <tucsonr at illinois.edu>
Sent: Tuesday, May 26, 2026 10:56 AM
To: 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Experience with Refractory Metal Liners for Pt E-beam Evaporation

Hello,

Does anyone have experience using refractory metal crucible liners for e-beam evaporation of platinum?
I am currently using Fabmate, which performs well until the platinum reaches higher temperatures, at which point carbon contamination becomes an issue. I have had good results using a tungsten liner for gold, and I’m considering trying tungsten for platinum as well.

However, I’ve come across online sources suggesting that refractory metals may not be compatible with platinum. I’d appreciate any insights or recommendations based on your experience. Thank you in advance.



Best,

Tucson Richelson

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