[labnetwork] Experience with Refractory Metal Liners for Pt E-beam Evaporation
Ryan Rivers
rrivers at berkeley.edu
Tue May 26 20:03:36 EDT 2026
It can be done, but you need to coat the liner in an appropriat3 way.
I coat my tungsten with ZrO2 and a long as you keep the temps low and the
pt full it works for years
On Tue, May 26, 2026, 4:39 PM Gabriel Catalano <gcatalano at stanford.edu>
wrote:
> Hi Tucson,
>
> Your online sources are correct, you cannot use refractory metal liners
> for Pt. We tried it (tungsten liner) and the Pt alloyed with the liner
> after a few depositions, causing the liner to totally collapse. Would not
> advise.
>
> Best,
> Gabe (Nano at Stanford)
> ------------------------------
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of
> Richelson, Tucson <tucsonr at illinois.edu>
> *Sent:* Tuesday, May 26, 2026 10:56 AM
> *To:* 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu>
> *Subject:* [labnetwork] Experience with Refractory Metal Liners for Pt
> E-beam Evaporation
>
> Hello,
>
> Does anyone have experience using refractory metal crucible liners for
> e-beam evaporation of platinum?
> I am currently using Fabmate, which performs well until the platinum
> reaches higher temperatures, at which point carbon contamination becomes an
> issue. I have had good results using a tungsten liner for gold, and I’m
> considering trying tungsten for platinum as well.
>
> However, I’ve come across online sources suggesting that refractory metals
> may not be compatible with platinum. I’d appreciate any insights or
> recommendations based on your experience. Thank you in advance.
>
>
> *Best,*
>
> *Tucson Richelson*
>
> -------------------------------------------------------------------------
>
> *Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)*
>
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