[labnetwork] Experience with Refractory Metal Liners for Pt E-beam Evaporation
Prashant Srinivasan
prashant at ucsb.edu
Tue May 26 19:55:50 EDT 2026
Hi,
Perhaps this was mentioned earlier, but why not use a Cu liner? I've
seen Pt evaporated directly from the hearth.
On 5/26/2026 10:56 AM, Richelson, Tucson wrote:
> Hello,
>
> Does anyone have experience using refractory metal crucible liners for
> e-beam evaporation of platinum?
> I am currently using Fabmate, which performs well until the platinum
> reaches higher temperatures, at which point carbon contamination
> becomes an issue. I have had good results using a tungsten liner for
> gold, and I’m considering trying tungsten for platinum as well.
>
> However, I’ve come across online sources suggesting that refractory
> metals may not be compatible with platinum. I’d appreciate any
> insights or recommendations based on your experience. Thank you in
> advance.
>
>
> /Best,/
>
> /Tucson Richelson/
>
> -------------------------------------------------------------------------
>
> *Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)*
>
> *University of Illinois**
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>
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--
Prashant Srinivasan,
Teaching Cleanroom Engineer
Electrical & Computer Engineering
University of California, Santa Barbara
Santa Barbara, California 93106
https://www.ece.ucsb.edu/department-resources/electronics-shop/tcr
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