[labnetwork] Experience with Refractory Metal Liners for Pt E-beam Evaporation

[Darick Baker]

Hello,

We've had very good luck running platinum in copper crucibles. Because we
only deposit thin films, we've been using thick-walled crucibles to
decrease the amount of platinum needed.

Twice over 10 years we've had damaged crucibles (similar to other
materials, much better than some). Both times it was user error. One time
the user placed the crucible on top of a thermally insulating carbon disk
(the SOP reminds users to check for this) and the other time an incorrect
recipe was used. In both cases, the user paid the difference between the
cost to replace the crucible and what we got back from reclaim.

On Wed, May 27, 2026 at 6:13 AM Prashant Srinivasan <prashant at ucsb.edu>
wrote:

> Hi,
>
> Perhaps this was mentioned earlier, but why not use a Cu liner? I've seen
> Pt evaporated directly from the hearth.
> On 5/26/2026 10:56 AM, Richelson, Tucson wrote:
>
> Hello,
>
> Does anyone have experience using refractory metal crucible liners for
> e-beam evaporation of platinum?
> I am currently using Fabmate, which performs well until the platinum
> reaches higher temperatures, at which point carbon contamination becomes an
> issue. I have had good results using a tungsten liner for gold, and I’m
> considering trying tungsten for platinum as well.
>
> However, I’ve come across online sources suggesting that refractory metals
> may not be compatible with platinum. I’d appreciate any insights or
> recommendations based on your experience. Thank you in advance.
>
>
> *Best,*
>
> *Tucson Richelson*
>
> -------------------------------------------------------------------------
>
> *Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)*
>
> *University of Illinois*
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> --
> Prashant Srinivasan,
> Teaching Cleanroom Engineer
> Electrical & Computer Engineering
> University of California, Santa Barbara
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-- 
Darick Baker, PhD
Acting Director
Washington Nanofabrication Facility (WNF)
University of Washington
Fluke Hall 115, Box 352143
Desk: 206.221.8265 Cell: 206.395.4049 (text preferred)
https://www.wnf.washington.edu/
Pronouns: he/him

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