[labnetwork] Sputter conditions for XPS samples?
Beaudoin, Mario
beaudoin at physics.ubc.ca
Tue May 26 19:57:42 EDT 2026
Dear Network,
We have inherited an old XPS machine. The XPS part works fine and we
know how to acquire data. For analysis, we will certainly consult
experts before publishing as we are aware of the potential pitfalls.
We also have an Argon source and sputter power supply and we would like
to sputter our sample surfaces to remove surface contaminants. The
problem: we are neophytes at that part of the process besides operating
the cylinder and leak valve.
My question: What are the typical Ar pressures and power settings
generally used for sputtering?
Please respond privately or through the network.
Big THANK YOU.
Mario
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