[labnetwork] Sputter conditions for XPS samples?

Beaudoin, Mario beaudoin at physics.ubc.ca
Tue May 26 19:57:42 EDT 2026


Dear Network,

We have inherited an old XPS machine.  The XPS part works fine and we 
know how to acquire data.  For analysis, we will certainly consult 
experts before publishing as we are aware of the potential pitfalls.

We also have an Argon source and sputter power supply and we would like 
to sputter our sample surfaces to remove surface contaminants.  The 
problem: we are neophytes at that part of the process besides operating 
the cylinder and leak valve.

My question: What are the typical Ar pressures and power settings 
generally used for sputtering?

Please respond privately or through the network.

Big THANK YOU.

Mario

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