[labnetwork] Oxford PlasmaPro 100

[Rohit Khanna]

Hi Mike, I would suggest to go with Advanced Energy as they are the original manufacturer for the RF generators in Oxford plasma tools. They would have all spare bits with them. We have also used RF global from Scotland(UK) in the past for MKS RF generators they are good however if you are based in USA look for local repairs companies as sending old stuff outside USA will require customs and other logistic costs.

Warm Regards
Rohit Khanna
Electronic Test & Measurement Engineer
London Centre for NANO Technology, UCL
Ph:+44-020-76799984
Lab: +44 20 3108 1516
Int Ext: 39984

________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Mike Maghiar <rmm2263 at columbia.edu>
Sent: 01 October 2026 19:06
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Oxford PlasmaPro 100


⚠ Caution: External sender

Hi all,

Our PlasmaPro 100 ICP RF unit has failed, and I was wondering if anyone knows a trusted source for repairs like this.

The unit is deprecated, and the solution available through Oxford is only to purchase a refurbished unit.

Thank you,
Mike Maghiar
CNI Cleanroom Director
CEPSR 1020
(212) 854-3032
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20261002/e5908b0a/attachment.html>