[labnetwork] 100% Silane Bottle Changing

[Dennis Schweiger]

Julia,

we have two cylinders of 100% Silane supporting our lab(s).  We try to get
our bottle change-out cadence for all of our HPM's to about 12 months,
which means that for some of the HPM materials we're using, we're
short-filling the cylinder.  All of our DISS compatible, HPM gas
cylinder cabinets are fully automatic and have preprogrammed procedures for
Prepurge, Cylinder Changeout, and Postpurge, cycles (all of these were set
up by the cabinet vendor).  In addition our HPM gas cylinders are set up
with a 0.010" orifice right in the DISS connector.  We also have an
extensive array of gas detection in each of our gas cabinets, as well as
through-out the fab areas.

Typically, when we do a cylinder changeout of any "hydride" material, we'll
use the buddy system, and depending on the gas, we'll be in supplied air as
a precaution, with independent point-of-use gas detection sniffing at the
DISS connections as we open them up.

All of our HPM cylinders get an in-board Helium leak check when the new
cylinder is installed.

We've only had a problem one time, many, many, many years ago, with an
older automatic cabinet.  There was a programming issue in the valve
sequence, and it vented the high pressure side of the regulator up the
stack, where the Silane detonated, while a cylinder prepurge was being
performed.  No one was hurt, but there was a lot of wide-eyed individuals
around after that happened.

Dennis Schweiger
Facilities Manager
University of Michigan
Lurie Nanofabrication Facility
1301 Beal Ave.
Ann Arbor, Michigan 48109

734.647.2055 Ofc

"People can be divided into 3 groups - those that make things happen, those
that watch things happen, and those that wonder what happened."  Within
which group do you belong?


On Mon, Jun 10, 2013 at 4:08 PM, Aebersold,Julia W. <
julia.aebersold at louisville.edu> wrote:

>  We are hooking up a new polysilicon tube and are working with 100%
> Silane.  I am seeking information on protocol and standard operating
> procedures (SOP’s) on how other groups and institutions perform this the
> process of changing their Silane bottle and leak checks.  We have our gas
> cabinet information, but due to the dangerous nature of this gas more I
> would like to gather information from other folks that have worked with
> this gas extensively.****
>
> ** **
>
> A written response to my e-mail is fine, but links to sites with official
> protocol and SOP’s would be preferred.****
>
> ** **
>
> Cheers!****
>
> ** **
>
> Julia Aebersold, Ph.D. ****
>
> MNTC Cleanroom Manager****
>
> Shumaker Research Building, Room 233****
>
> 2210 South Brook Street****
>
> University of Louisville****
>
> Louisville, KY  40292****
>
> ** **
>
> 502-852-1572****
>
> http://louisville.edu/micronano/**
>
> ** **
>
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