[labnetwork] 100% Silane Bottle Changing

Tue Jun 11 20:26:37 EDT 2013

Hello Iulian,

You are correct regarding the helium leak check portion of the procedure. The Helium leak check wasn't included in our write-up because that is a standard procedure with all cylinder changes. Most gas cabinet controllers, like our Air Products controllers, will prompt for an outboard leak check on cylinder connection after a sequence of events post Cylinder Change. At this time a leak checker capable of detecting Helium, if they are using a mixed gas, should be used. I should have been more clear that this was additional to standard cylinder change procedures. Sorry if this caused any confusion.

Any other questions or comments, feel free to respond

Best regards,

Tom Britton
Director of Sales
Critical Systems, Inc.
7000 W. Victory Road
Boise, ID 83709
Direct: 208-890-1417
Shop:   877-572-5515
www.criticalsystemsinc.com<http://www.criticalsystemsinc.com/>

    "World Leader in UHP Reconditioned
 Gas Delivery & Abatement Technologies"

From: Iulian Codreanu [mailto:codreanu at udel.edu]
Sent: Tuesday, June 11, 2013 2:31 PM
To: Tom Britton
Cc: Fab Network
Subject: Re: [labnetwork] 100% Silane Bottle Changing

There may be a slightly safer way for leak checking the pigtail to cylinder valve connection.  This is done by filling the pigtail with a He containing gas as part of the Post Purge (this can be included in the Post Purge sequence by the gas cabinet manufacturer) and using a hand held He leak checker.  I use He or a H2/N2 mixture for the purge gas; this is more expensive than N2 but worth it.  With Silane and other high pressure nasty gases I do both a low pressure leak check and a high pressure leak check.

iulian Codreanu, Ph.D.

Director of Operations, UD Nanofab

149 Evans Hall

Newark, DE 19716

302-831-2784
On 6/11/2013 1:27 PM, Tom Britton wrote:
Hello Laura,

Here is what we offer from Critical Systems. These practices come from a production environment, but should be well suited for use at your facility.

SiH4 Cylinder Change

Scope: This covers the basic steps of changing a SiH4 Cylinder, recommended Personal Protective Equipment (PPE), best known methods used in the industry and is not intended as a Procedure.

Cylinder Change Sequence:

  1.  Cylinder Valve Shutoff Test
  2.  Pre Purge
  3.  Cylinder Change
  4.  Post Purge
  5.  Gas Introduction

1. Cylinder Valve Shutoff Test:

  1.  Close Cylinder Valve:

     *   Remove quick disconnect from cylinder valve. Quick disconnect connects to top of cylinder valve. SiH4 cylinder should be equipped with an Air operated cylinder valve (Normally Closed)
     *   Rotate knurled handle on valve approximately 90 degrees (verify direction of rotation with arrow and label located either on the side of the cylinder valve or the top of the cylinder valve.)

2. Pre Purge

     *   Auto purge should be set up to perform 60 cycles of pressure at a minimum of 80 psi and vacuum -12

3. Cylinder change: Recommended equipment and Personal Protective Equipment

     *   Recommended Personal Protective Equipment
·        Nomex hood; should cover head, face (over nose and mouth) and  neck area
·        Nomex Smock
·        Safety Glasses
·        Face Shield
·        Gloves (gauntlet style leather)
·        Handheld leak checker specific to SIH4 (ppm level detection)

     *   Buddy System: Always use two people to change cylinder.
·        Disconnect pigtail from cylinder valve through window with door closed and latched,
·        One person uses leak checker to verify cylinder valve one person to disconnect cylinder.
·        Place cap on cylinder valve prior removing from cabinet
·        Place cylinder cap on cylinder prior to removing from cabinet.
·        Always use new DISS Gasket when installing new cylinder

4. Post Purge

     *   Auto purge should be set up for a minimum of 60 purge cycles to remove all atmosphere or moisture introduced during cylinder change.

5. Gas Introduction

     *   Rotate cylinder valve or knurled handle as per directions on either the side of the cylinder valve or the top of the cylinder valve.
     *   Attach quick disconnect fitting or airline.
     *   When cylinder pressure is indicated on PT-1 use handheld leak checker on pigtail connection to cylinder valve verify no leaks.

If you have any questions, please let me know.

Tom Britton
Director of Sales
Critical Systems, Inc.
7000 W. Victory Road
Boise, ID 83709
Direct: 208-890-1417
Shop:   877-572-5515
www.criticalsystemsinc.com<http://www.criticalsystemsinc.com/>

    "World Leader in UHP Reconditioned
 Gas Delivery & Abatement Technologies"

From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Laura Malatto
Sent: Tuesday, June 11, 2013 6:16 AM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] 100% Silane Bottle Changing

Dear All,

Information for manipulation of 2% Silane bottle will also be appreciated!. We are a research group and is the first time we will work with silane. We are installing a PECVD, and we are deciding between 100% silane and 2% silane/N2. We will probably select low concentration as it is less dangerous.
Any recomendation / link / book will be very appreciated!

Many thanks, Laura

_____________________________________________

Ing. Laura Malatto

Jefe de Laboratorio

Procesos Microelectrónicos

INTI-Micro y Nanoelectrónica del Bicentenario (CMNB)

PTM - Ed. 42

Buenos Aires - Argentina

TEL:(+5411)<TEL:%28+5411%29> 4724 6430

FAX:(+5411) 4754 5194

_____________________________________________

0800 444 4004 | www.inti.gob.ar<http://www.inti.gob.ar>
El 10/06/2013 05:08 p.m., Aebersold,Julia W. escribió:
We are hooking up a new polysilicon tube and are working with 100% Silane.  I am seeking information on protocol and standard operating procedures (SOP's) on how other groups and institutions perform this the process of changing their Silane bottle and leak checks.  We have our gas cabinet information, but due to the dangerous nature of this gas more I would like to gather information from other folks that have worked with this gas extensively.

A written response to my e-mail is fine, but links to sites with official protocol and SOP's would be preferred.

Cheers!

Julia Aebersold, Ph.D.
MNTC Cleanroom Manager
Shumaker Research Building, Room 233
2210 South Brook Street
University of Louisville
Louisville, KY  40292

502-852-1572
http://louisville.edu/micronano/

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