[labnetwork] 100% Silane Bottle Changing
Iulian Codreanu
codreanu at udel.edu
Tue Jun 11 16:31:15 EDT 2013
There may be a slightly safer way for leak checking the pigtail to
cylinder valve connection. This is done by filling the pigtail with a
He containing gas as part of the Post Purge (this can be included in the
Post Purge sequence by the gas cabinet manufacturer) and using a hand
held He leak checker. I use He or a H2/N2 mixture for the purge gas;
this is more expensive than N2 but worth it. With Silane and other high
pressure nasty gases I do both a low pressure leak check and a high
pressure leak check.
iulian Codreanu, Ph.D.
Director of Operations, UD Nanofab
149 Evans Hall
Newark, DE 19716
302-831-2784
On 6/11/2013 1:27 PM, Tom Britton wrote:
>
> Hello Laura,
>
> Here is what we offer from Critical Systems. These practices come from
> a production environment, but should be well suited for use at your
> facility.
>
> *SiH4 Cylinder Change*
>
> *Scope:* This covers the basic steps of changing a SiH4 Cylinder,
> recommended Personal Protective Equipment (PPE), best known methods
> used in the industry and is not intended as a Procedure.
>
> *Cylinder Change Sequence*:
>
> 1. Cylinder Valve Shutoff Test
> 2. Pre Purge
> 3. Cylinder Change
> 4. Post Purge
> 5. Gas Introduction
>
> *1. Cylinder Valve Shutoff Test:*
>
> 1. Close Cylinder Valve:
> * Remove quick disconnect from cylinder valve. Quick disconnect
> connects to top of cylinder valve. SiH4 cylinder should be
> equipped with an Air operated cylinder valve (Normally Closed)
> * Rotate knurled handle on valve approximately 90 degrees
> (verify direction of rotation with arrow and label located
> either on the side of the cylinder valve or the top of the
> cylinder valve.)
>
> *2. Pre Purge*
>
> * Auto purge should be set up to perform 60 cycles of pressure
> at a minimum of 80 psi and vacuum -12
>
> *3. Cylinder change*: Recommended equipment and Personal Protective
> Equipment
>
> * Recommended Personal Protective Equipment
>
> ·Nomex hood; should cover head, face (over nose and mouth) and neck area
>
> ·Nomex Smock
>
> ·Safety Glasses
>
> ·Face Shield
>
> ·Gloves (gauntlet style leather)
>
> ·Handheld leak checker specific to SIH4 (ppm level detection)
>
> * Buddy System: Always use two people to change cylinder.
>
> ·Disconnect pigtail from cylinder valve through window with door
> closed and latched,
>
> ·One person uses leak checker to verify cylinder valve one person to
> disconnect cylinder.
>
> ·Place cap on cylinder valve prior removing from cabinet
>
> ·Place cylinder cap on cylinder prior to removing from cabinet.
>
> ·Always use new DISS Gasket when installing new cylinder
>
> *4. Post Purge *
>
> * Auto purge should be set up for a minimum of 60 purge cycles
> to remove all atmosphere or moisture introduced during
> cylinder change.
>
> *5. Gas Introduction*
>
> * Rotate cylinder valve or knurled handle as per directions on
> either the side of the cylinder valve or the top of the
> cylinder valve.
> * Attach quick disconnect fitting or airline.
> * When cylinder pressure is indicated on PT-1 use handheld leak
> checker on pigtail connection to cylinder valve verify no leaks.
>
> If you have any questions, please let me know.
>
> Tom Britton
>
> Director of Sales
>
> Critical Systems, Inc.
>
> 7000 W. Victory Road
>
> Boise, ID 83709
>
> Direct: 208-890-1417
>
> Shop: 877-572-5515
>
> www.criticalsystemsinc.com <http://www.criticalsystemsinc.com/>
>
> / "World Leader in UHP Reconditioned /
>
> / Gas Delivery & Abatement Technologies"/
>
> *From:*labnetwork-bounces at mtl.mit.edu
> [mailto:labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Laura Malatto
> *Sent:* Tuesday, June 11, 2013 6:16 AM
> *To:* labnetwork at mtl.mit.edu
> *Subject:* Re: [labnetwork] 100% Silane Bottle Changing
>
> Dear All,
>
> Information for manipulation of 2% Silane bottle will also be
> appreciated!. We are a research group and is the first time we will
> work with silane. We are installing a PECVD, and we are deciding
> between 100% silane and 2% silane/N2. We will probably select low
> concentration as it is less dangerous.
> Any recomendation / link / book will be very appreciated!
>
> Many thanks, Laura
>
>
> _____________________________________________
> Ing. Laura Malatto
> Jefe de Laboratorio
> Procesos Microelectrónicos
> INTI-Micro y Nanoelectrónica del Bicentenario (CMNB)
> PTM - Ed. 42
> Buenos Aires - Argentina
> TEL:(+5411) <TEL:%28+5411%29> 4724 6430
> FAX:(+5411) 4754 5194
> _____________________________________________
> 0800 444 4004 |www.inti.gob.ar <http://www.inti.gob.ar>
>
> El 10/06/2013 05:08 p.m., Aebersold,Julia W. escribió:
>
> We are hooking up a new polysilicon tube and are working with 100%
> Silane. I am seeking information on protocol and standard
> operating procedures (SOP's) on how other groups and institutions
> perform this the process of changing their Silane bottle and leak
> checks. We have our gas cabinet information, but due to the
> dangerous nature of this gas more I would like to gather
> information from other folks that have worked with this gas
> extensively.
>
> A written response to my e-mail is fine, but links to sites with
> official protocol and SOP's would be preferred.
>
> Cheers!
>
> Julia Aebersold, Ph.D.
>
> MNTC Cleanroom Manager
>
> Shumaker Research Building, Room 233
>
> 2210 South Brook Street
>
> University of Louisville
>
> Louisville, KY 40292
>
> 502-852-1572
>
> http://louisville.edu/micronano/
>
>
>
>
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