[labnetwork] Metal in our DRIE

[Peter Lomax]

Hi

We occasionally allow metal in one of our systems but usually restricted to Cr or W. These are hopefully taken away rather than redepositing  and leading to micro-masking of future etches.

We had a problem several years ago when somebody used Al and it was a nightmare to get the chamber clean afterwards.

Best

Peter


Dr Peter Lomax,
Principal Experimental Officer, The School of Engineering, The University of Edinburgh,
Scottish Microelectronics Centre,
Alexander Crum Brown Road, Edinburgh, EH9 3FF
Phone:  +44 (0) 131 650 7146
[cid:image001.png at 01DADE8B.D346E4B0]

Facebook<https://www.facebook.com/SchoolOfEngineering.UoE> | Twitter<https://twitter.com/SchoolOfEng_UoE> | Youtube<https://www.youtube.com/SchoolOfEngUoE> | LinkedIn<http://www.linkedin.com/company/university-of-edinburgh-school-of-engineering>

The University of Edinburgh is a charitable body, registered in Scotland, with registration number SC005336.




From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of McKenna, Curtis
Sent: 24 July 2024 15:30
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Metal in our DRIE

This email was sent to you by someone outside the University.
You should only click on links or attachments if you are certain that the email is genuine and the content is safe.
Hi Labnetwork,

We recently purchased a new DRIE and are left without any users for our older but still functional STS Multiplex ASE.  We are currently debating selling off the tool or turning it into a "dirty" tool and allowing metals inside the chamber, which has been a commonly requested process for as long as we have had it.  I'm curious if anyone else has tried this with their DRIE and what kind of results you saw regarding the long-term viability of the tool.


Curt McKenna
Facilities Manager, Micro/Nano Technology Center
University of Louisville
2210 South Brook Street
Shumaker Research Building, Room 232
Louisville, KY  40292
http://louisville.edu/micronano/<http://louisville.edu/micronano>


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20240725/79b475ba/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image001.png
Type: image/png
Size: 19700 bytes
Desc: image001.png
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20240725/79b475ba/attachment.png>