[labnetwork] XeF2 suppliers

Kyle Keenan kckeenan at seas.upenn.edu
Tue May 13 12:06:39 EDT 2025


Hello All,

Who are you using to supply XeF2 for your etchers? We have an Xactix e1,
and we last got our stuff from Pelchem through Linde, but Linde no longer
sells XeF2, and it is not yet clear if Linde will sell direct.

I look forward to your responses.

Thank you,
-- 
Kyle Keenan

Senior Manager - Laboratory Operations
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925
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